Research Advances in UV Aging of Parylene Film
Õª¡¡Òª :
¼òÂÔ½é½BÁËParyleneËÜÁϱ¡Ä¤µÄÓÅÁ¼ÌØÐÔ¼°Æä¹Ø¼üÔËÓ÷¶³ë¡£¾ßÌåÃèÊöÁ˹úÄÚ¶ÔParyleneËÜÁϱ¡Ä¤ÔÚ×ÏÍâÏßÖ±Éä±ê×¼ÏÂË¥ÀϸöÈËÐÐΪµÄÈ«ÐÂÑо¿³É¹û¡£Ì½ÌÖÁË×ÏÍâÏßË¥ÀϵÄÔÀí¡¢¹Ø¼ü×´¿ö¡¢ÎïÖÊ£¬¼°ÆäË¥À϶ÔParylene±¡Ä¤¹âѧÌØÐÔ¡¢Í¸ÆøÐÔ͸ÆøÐÔÄÜÄÜ¡¢ÎïÀíÐÔÄÜ¡¢µç´Å³¡ÀíÂÛÌØÐÔµÄΣº¦¡£
Abstract :
The excellent properties and main applications of Parylene film were introduced. The latestresearch advances in UV aging of Parylene film were summarized. The mechanism, main
phenomenon and products of UV aging, and the effects of UV aging on the optical properties,water permeability and air permeability, mechanical properties and electromagnetic properties of Parylene film were discussed.
¹Ø¼ü×Ö :
¾Û¶Ô±½³Å¶þ¼×»ù£»×ÏÍâÏßË¥ÀÏ£»ÎïÖÊ£»ÌØÐÔ
Key words :
Parylene; UV aging; Products; Properties
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ͼ1 ¼¸Àà³£¼ûParyleneµÄ»¯Ñ§½á¹¹
Fig.1 Chemical structure of commercial Parylenes
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1 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯¸öÈËÐÐΪ
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ͼ2 Parylene CËÜÁϱ¡Ä¤µÄ×ÏÍâ¹â-Äܼû¹âµÄͨ¹ý×´¿ö
Fig.2 UV-visible light transmittance of Parylene C film
1.1 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯ÔÀí
ParyleneËÜÁϱ¡Ä¤ÔÚ»§Íâ¾³¤Ê±¼äÈÕ¹âÖ±Éäºó£¬¿É¿¿ÐÔ¼±¾çϽµ[38-39]£¬ÑÓÐÔÌáÉýÇÒ¿¹ÀÇ¿¶È¼õÉÙ¡£BeraµÈ¾ÍParylene CËÜÁϱ¡Ä¤µÄÀÏ»¯¿ªÕ¹ÁËÐí¶à¿ÆѧÑо¿£¬ÌرðÊdz¬¹ý300 nm×ÏÍâÏßϵĴ໯¸öÈËÐÐΪ[40-41]£¬²¢Ñ¡ÓöàÖÖÐÎʽÆÊÎöÁËÆäÀÏ»¯ÎïÖÊ£¬×îºóÇ¿µ÷Parylene CËÜÁϱ¡Ä¤»á±»¹â¼¤Æð¶ø¶Ï¼ü£¬Ôì³ÉÑõ×ÔÓÉ»ù½ø¶øÔì³É»¯Ñ§½µ½â£¬×ª»¯³ÉһЩµÍÏà¶Ô·Ö×ÓÖÊÁ¿µÄË¥ÀÏÎïÖÊ£¬Æä¹Ø¼üÈܽâÈ«¹ý³ÌÈçÏÂͼ3ËùÏÔʾ¡£ËýÃÇÁ˽âÁËParylene NµÄË¥ÀÏÔÀí£¬¾õµÃËüµÄË¥ÀÏ×îÏÈÊÇÒÔ¡ªCH2¡ªµÄ¿ÕÆøÑõ»¯Öð½¥£¬½ø¶øÔÚÑô¹âÕÕÉä×´¿öÏÂת»¯³ÉÈ©¡¢·Ò·¼Ëá¡¢õ¥µÈÑõ»¯²úÎ´ËÍ⣬¸ù¾ÝÀÏ»¯ÎïÖʵĴ߻¯ÁѽâʵÑé·¢¾õÁËСÁ¿Âȶ¡¶þÏ©µÄÔì³É£¬Õâ½øÒ»²½±íÃ÷¹âÑõË¥ÀÏÊǸù¾Ý×ÔÓÉ»ù·´Ó¦ÔÀí¿ªÕ¹µÄ¡£³ý´ËÖ®Í⣬Õë¶ÔParylene¸ß¾ÛÎ¹ÙÄÜÍŶÔÆäÌØÐÔΣº¦·Ç³£´ó£¬Òò¶øÏà¹ØParylene CËÜÁϱ¡Ä¤Ë¥ÀÏÔÀíºÍÌØÐÔת±äµÄ¿ÆѧÑо¿Ò²Óкܶ๤×÷ÖбØÐë½øÐС£
ͼ3 Parylene CÏû»¯ÎüÊÕ¹âÆÆÁѲúÉúµÄС·Ö×ÓË®
Fig.3 Formation of low molecular due to \’light absorbing\’ of Parylene C
1.2 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯×´¿ö
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ͼ4 Parylene CµÄÜÌÀàºÍÁùÔª»·¡°Ê§ÂÌ¡±ÎïÖÊ
Fig.4 Etiolated production of fluorenes and hexatomic ring of Parylene C
ÀÏ»¯Ôì³ÉParylene CËÜÁϱ¡Ä¤±ä´à£¬Ç¿¶ÈÌáÉýÇÒ¿¹ÀÇ¿¶È½µµÍ¡£Nowlin[32]µÄÑо¿½á¹ûÏÔʾ£¬ËÜÁϱ¡Ä¤µÄ¿¹ÀÇ¿¶ÈÓë±»Ñõ»¯Ë®Æ½Ïà¹Ø£¬¿ÕÆøÑõ»¯Ë®Æ½Ô½¸ß£¬¿¹ÀÇ¿¶ÈÔ½µÍ£»´ËÍ⣬ͨ¹ý×ÏÍâÏßÖ±Éäºó£¬ËÜÁϱ¡Ä¤µÄÏà¶ÔÐÔ²£Á§»¯Î¶ÈÏÈÌáÉýºó¼õÉÙ¡£
1.3 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯ÎïÖÊ
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±í1 ×ÏÍâÏßË¥ÀÏÎïÖÊ
Tab.1 UV aging products of Parylene C
2 ÀÏ»¯¶ÔParyleneËÜÁϱ¡Ä¤ÌØÐÔµÄΣº¦
ParyleneËÜÁϱ¡Ä¤µÄµç×Ó¹âѧÌØÐÔ¡¢Í¸ÆøÐÔ͸ÆøÐÔÄÜÄÜ¡¢ÎïÀíÐÔÄÜ£¬¼°Æäµç´Å³¡ÀíÂÛÌØÐÔÊÇÆä¹Ø¼üÖ¸±êÖµ£¬¶ÔÆäÔËÓþßÓзdz£ÖØÒªµÄΣº¦¡£Òò¶ø¿ÆѧÑо¿ÀÏ»¯ºóParyleneËÜÁϱ¡Ä¤ÌØÐÔµÄת±ä£¬¶ÔÆä¾ßÌåÔËÓþ߱¸Ö÷ÒªÏÖʵÒâÒå¡£
2.1 µç×Ó¹âѧÌØÐÔ
ParyleneËÜÁϱ¡Ä¤¶ÔÄܼû¹âµÄ͸¹â¶ÈΪ90%ÉÏÏ¡£SantucciµÈ[29]¸ÉÁ˾×ÏÍâÏßÖ±ÉäµÄParylene CËÜÁϱ¡Ä¤ÓÚÆøÌå¡¢H2O¡¢H2O2¡¢O2¡¢He±ê׼ϣ¬ÔÚÄܼû¹âµØÇø¿ªÕ¹Í¸¹â¶È¿ÆѧÑо¿¡£½«±¡ºñΪ300 nmµÄParylene CËÜÁϱ¡Ä¤¸÷×Ô·ÅÖò»Ò»ÑùµÄÆûÌå·ÕΧÖУ¬²¢ÇÒÒÔ254 nmµÄ×ÏÍâÏßÖ±Éä120 min¡£½Y¹û·¢¾õ£º½â¾ö¹ýµÄËÜÁϱ¡Ä¤¶ÔÄܼû¹âµÄ͸¹â¶È»ù±¾ÉÏ›]ÓÐת±ä£¬¼ûͼ5£»µ«µ±·¢Éú¡°Ê§ÂÌ¡±×´¿ö(ËÜÁϱ¡Ä¤ÒÑÏÔÖøË¥ÀÏ)ºó£¬Æä͸¹â¶ÈÏÔÖø½µµÍ¡£
ͼ5 ÔÚ²»Ò»ÑùÆûÌåÖÐ͸¹â¶ÈËæÖ±Éä•r¼äµÄת±ä
Fig.5 Transmittance changes with irradiation time in different gases
2.2 ͸ÆøÐÔ͸ÆøÐÔÄÜÄÜ
ParyleneËÜÁϱ¡Ä¤¶ÔË®ÕôÆû¡¢CO2µÈÆûÌåµÄ¸ß×è¸ôÊÇÆäÌØÐÔµÄÖ÷Òª±ê×¼Ö®Ò»£¬ÊÇÈ·¶¨ÆäʹÓ÷¶³ëµÄÓÈΪÖØÒªµÄÒªËØ¡£W H HubbellµÈ[44]Ñо¿·¢ÏÖ£¬ParyleneCËÜÁϱ¡Ä¤¾ß½ÏºÃµÄ¿¹Êª·ÀË®¼°ÆûÌå¸ô¾øÌص㣻´ËÍâ¾ÅÓλáJ9ÕæÈË»¹·¢¾õ£¬²»Ò»ÑùÖÖÀàParyleneËÜÁϱ¡Ä¤ÖУ¬Parylene CËÜÁϱ¡Ä¤¶ÔH2O¡¢O2ºÍCO2µÄ¸ô¾øÌØÐÔ×îºÃÊÇ[45]¡£ÓÐÑо¿±íÃ÷£¬Ë®ÕôÆûµÈÔÚËÜÁϱ¡Ä¤ÖеÄÂûÑÓºÍÉøÈëÖ÷ÒªÊǸù¾Ý²»¶¨ÐÎÇø½øÐеÄ[46]£»¾×ÏÍâÏßÖ±Éäºó£¬ËÜÁϱ¡Ä¤µÄÏà¶ÔÐÔ²£Á§»¯Î¶ÈÇ÷Ïò½¡È«£¬²»¶¨ÐεØÇø½µµÍ£¬Òò¶ø¶ÔË®ÕôÆûµÄ¸ô¾øÌØÐÔÓÐËùÔö¼Ó£»µ«µ±Ö±Éä•r¼ä½øÒ»²½ÌáÉý£¬ËÜÁϱ¡Ä¤µÄ·Ö×ӽṹÁ´ºÜÓпÉÄܲúÉúÆÆÁÑ£¬µ¼Ö²£Á§»¯Î¶ȽµµÍ¡¢Í¸ÆøÐÔÄÜÌáÉý[47]£¬¼ûͼ6¡£
ͼ6 Ë®ÕôÆûͨ¹ýÐÔËæÖ±Éä•r¼äµÄת±äÇúÏßͼ
Fig.6 Variation curve between vapor permeability and irradiation time
2.3 ÎïÀíÐÔÄÜ
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2.4 µç´Å³¡ÀíÂÛÌØÐÔ
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