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¾ÅÓλáJ9 ä¯ÀÀ´ÎÊý:2040 ·ÖÀà:ÐÐÒµ×ÊѶ

Research Advances in UV Aging of Parylene Film

Õª¡¡Òª :

¼òÂÔ½é½BÁËParyleneËÜÁϱ¡Ä¤µÄÓÅÁ¼ÌØÐÔ¼°Æä¹Ø¼üÔËÓ÷¶³ë¡£¾ßÌåÃèÊöÁ˹úÄÚ¶ÔParyleneËÜÁϱ¡Ä¤ÔÚ×ÏÍâÏßÖ±Éä±ê×¼ÏÂË¥ÀϸöÈËÐÐΪµÄÈ«ÐÂÑо¿³É¹û¡£Ì½ÌÖÁË×ÏÍâÏßË¥ÀϵÄÔ­Àí¡¢¹Ø¼ü×´¿ö¡¢ÎïÖÊ£¬¼°ÆäË¥À϶ÔParylene±¡Ä¤¹âѧÌØÐÔ¡¢Í¸ÆøÐÔ͸ÆøÐÔÄÜÄÜ¡¢ÎïÀíÐÔÄÜ¡¢µç´Å³¡ÀíÂÛÌØÐÔµÄΣº¦¡£

Abstract :

The excellent properties and main applications of Parylene film were introduced. The latestresearch advances in UV aging of Parylene film were summarized. The mechanism, main

phenomenon and products of UV aging, and the effects of UV aging on the optical properties,water permeability and air permeability, mechanical properties and electromagnetic properties of Parylene film were discussed.

¹Ø¼ü×Ö :

¾Û¶Ô±½³Å¶þ¼×»ù£»×ÏÍâÏßË¥ÀÏ£»ÎïÖÊ£»ÌØÐÔ

Key words :

Parylene; UV aging; Products; Properties

 

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1.png

ͼ1 ¼¸Àà³£¼ûParyleneµÄ»¯Ñ§½á¹¹

Fig.1 Chemical structure of commercial Parylenes

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1 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯¸öÈËÐÐΪ

SantuciµÈ¶ÔParyleneËÜÁϱ¡Ä¤ÔÚ×ÏÍâ¹â-Äܼû¹âÇø¶Ô¹âÏßµÄÏû»¯ÎüÊÕ×´¿ö¿ªÕ¹ÁËÏ꾡µÄ¿ÆѧÑо¿£¬½á¹ûÏÔʾ£¬ParyleneËÜÁϱ¡Ä¤¶Ô340 nm֮ϵÄ×ÏÍâÏßÏû»¯ÎüÊÕÃ÷ÏÔ£¬¶øÕë¶Ô340nmÒÔÉϵĹâ»ù±¾Éϲ»Ïû»¯ÎüÊÕ[29,36-37]¡£Òò¶øParyleneËÜÁϱ¡Ä¤ÀÏ»¯¸öÈËÐÐΪ¹Ø¼ü¿ÆѧÑо¿µÄÊÇ×ÏÍâÏß¹¦Ð§ÏµÄË¥ÀÏ¡£Ñ§Õ߶ÔParylene CËÜÁϱ¡Ä¤ÔÚ×ÏÍâ¹â-¿É¼û¹â·¶Î§ÄÚµÄÏû»¯ÎüÊÕ×´¿ö¿ªÕ¹Á˼ì²âÆÊÎö(ͼ2)£¬²¢¹Û²éµ½ÔÚ×ÏÍâÏßÖ±ÉäÏÂËÜÁϱ¡Ä¤»áÔì³É¡°Ê§ÂÌ¡±×´¿ö£»´ËÍâÔÚÓÐÑõÔ˶¯±ê׼ϣ¬ÆäÀÏ»¯¸öÈËÐÐΪ»á¼Ó¿ì£¬¡°Ê§ÂÌ¡±×´¿ö¸üΪÏÔÖø¡£

2.png

ͼ2 Parylene CËÜÁϱ¡Ä¤µÄ×ÏÍâ¹â-Äܼû¹âµÄͨ¹ý×´¿ö

Fig.2 UV-visible light transmittance of Parylene C film

1.1 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯Ô­Àí

ParyleneËÜÁϱ¡Ä¤ÔÚ»§Íâ¾­³¤Ê±¼äÈÕ¹âÖ±Éäºó£¬¿É¿¿ÐÔ¼±¾çϽµ[38-39]£¬ÑÓÐÔÌáÉýÇÒ¿¹À­Ç¿¶È¼õÉÙ¡£BeraµÈ¾ÍParylene CËÜÁϱ¡Ä¤µÄÀÏ»¯¿ªÕ¹ÁËÐí¶à¿ÆѧÑо¿£¬ÌرðÊdz¬¹ý300 nm×ÏÍâÏßϵĴ໯¸öÈËÐÐΪ[40-41]£¬²¢Ñ¡ÓöàÖÖÐÎʽÆÊÎöÁËÆäÀÏ»¯ÎïÖÊ£¬×îºóÇ¿µ÷Parylene CËÜÁϱ¡Ä¤»á±»¹â¼¤Æð¶ø¶Ï¼ü£¬Ôì³ÉÑõ×ÔÓÉ»ù½ø¶øÔì³É»¯Ñ§½µ½â£¬×ª»¯³ÉһЩµÍÏà¶Ô·Ö×ÓÖÊÁ¿µÄË¥ÀÏÎïÖÊ£¬Æä¹Ø¼üÈܽâÈ«¹ý³ÌÈçÏÂͼ3ËùÏÔʾ¡£ËýÃÇÁ˽âÁËParylene NµÄË¥ÀÏÔ­Àí£¬¾õµÃËüµÄË¥ÀÏ×îÏÈÊÇÒÔ¡ªCH2¡ªµÄ¿ÕÆøÑõ»¯Öð½¥£¬½ø¶øÔÚÑô¹âÕÕÉä×´¿öÏÂת»¯³ÉÈ©¡¢·Ò·¼Ëá¡¢õ¥µÈÑõ»¯²úÎ´ËÍ⣬¸ù¾ÝÀÏ»¯ÎïÖʵĴ߻¯ÁѽâʵÑé·¢¾õÁËСÁ¿Âȶ¡¶þÏ©µÄÔì³É£¬Õâ½øÒ»²½±íÃ÷¹âÑõË¥ÀÏÊǸù¾Ý×ÔÓÉ»ù·´Ó¦Ô­Àí¿ªÕ¹µÄ¡£³ý´ËÖ®Í⣬Õë¶ÔParylene¸ß¾ÛÎ¹ÙÄÜÍŶÔÆäÌØÐÔΣº¦·Ç³£´ó£¬Òò¶øÏà¹ØParylene CËÜÁϱ¡Ä¤Ë¥ÀÏÔ­ÀíºÍÌØÐÔת±äµÄ¿ÆѧÑо¿Ò²Óкܶ๤×÷ÖбØÐë½øÐС£

3.png

ͼ3 Parylene CÏû»¯ÎüÊÕ¹âÆÆÁѲúÉúµÄС·Ö×ÓË®

Fig.3 Formation of low molecular due to \’light absorbing\’ of Parylene C

1.2 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯×´¿ö

ÔÚÑô¹âÕÕÉäÈ«¹ý³ÌÖУ¬ParyleneËÜÁϱ¡Ä¤±í²ãÂýÂý±ä»Æ£¬¶øÇÒÕâÀࡰʧÂÌ¡±×´¿ö»á°éËæ×ÅÑô¹âÕÕÉä•r¼äµÄÔö¼Ó¶øÔ½À´Ô½Óú·¢ÏÔÖø¡£BeraµÈ[40]¾õµÃParylene CËÜÁϱ¡Ä¤µÄ¡°Ê§ÂÌ¡±Òª±ÈParylene NËÜÁϱ¡Ä¤¸üÏÔÖø£¬²¢½«¸Ã¡°Ê§ÂÌ¡±×´¿ö±íÊöΪת»¯³ÉÁ˹²Õñ̬ÜÌÀàÎïÖÊ¡£¶øÀîСÁúµçÓ°µÈ[17]Ôò¾õµÃÎåÔª»·ÜÌÀàÎïÖÊÔÚ·´Ó³Ô­Ê¼¾ÍÉÙÁË1¸ö¼×»ù£¬´ËÍâ¸ù¾Ý¶Ô´ß»¯Áѽâ²ÐƬÕýÀë×ӵļìÑ飬¾õµÃÁùÔª»·ÎïÖÊÏà¶ÔÐÔ¸üÒײúÉú¡¢¸üƽÎÈ£¬²¢ÇÒ¸ü¼ÓÓÐЧ¡£¶þÕßµÄת»¯³ÉÈ«¹ý³ÌÈçÏÂͼ4ËùÏÔʾ¡£

4.png

ͼ4 Parylene CµÄÜÌÀàºÍÁùÔª»·¡°Ê§ÂÌ¡±ÎïÖÊ

Fig.4 Etiolated production of fluorenes and hexatomic ring of Parylene C

ÀÏ»¯Ôì³ÉParylene CËÜÁϱ¡Ä¤±ä´à£¬Ç¿¶ÈÌáÉýÇÒ¿¹À­Ç¿¶È½µµÍ¡£Nowlin[32]µÄÑо¿½á¹ûÏÔʾ£¬ËÜÁϱ¡Ä¤µÄ¿¹À­Ç¿¶ÈÓë±»Ñõ»¯Ë®Æ½Ïà¹Ø£¬¿ÕÆøÑõ»¯Ë®Æ½Ô½¸ß£¬¿¹À­Ç¿¶ÈÔ½µÍ£»´ËÍ⣬ͨ¹ý×ÏÍâÏßÖ±Éäºó£¬ËÜÁϱ¡Ä¤µÄÏà¶ÔÐÔ²£Á§»¯Î¶ÈÏÈÌáÉýºó¼õÉÙ¡£

1.3 ParyleneËÜÁϱ¡Ä¤ÀÏ»¯ÎïÖÊ

Pruden¡¢SantuciµÈ¸ÉÁËParyleneËÜÁϱ¡Ä¤µÄ¹âÑõ¸ßµÍÎÂÊÔÑ飬·¢¾õÎïÖʹؼüΪ´øÓÐC=OµÄ»¯Ñ§ÎïÖÊ[29,36,42]¡£C=O²úÉúºó£¬·Ö×ӽṹÁ´±ã»áÔÚÒ»¶¨Ë®Æ½ÉϼӿìÈܽâ[43]¡£²ÜÇí»ªµÈ[35]¸ù¾ÝPY-GC/MS¼¼ÊõÐÔ¶ÔParylene CËÜÁϱ¡Ä¤ÀÏ»¯ÁÑ»¯ÎïÖÊ¿ªÕ¹ÁËÆÊÎö£¬µÃµ½ÖÊÆ×·ÖÎöÆÀ¶¨½Y¹û(Èç±í1ËùÏÔʾ)¡£´Ó±í1¿ÉÒÔ¿´µÃ³ö£¬¹âÑõË¥ÀϺó£¬Parylene CËÜÁϱ¡Ä¤µÄת»¯ÎïÖʹؼüÓб½¼×È©Àà¿ÕÆøÑõ»¯²ÐƬ¼°µ¥¸ö²ÐƬ£¬±íÃ÷¹âÑõË¥ÀϺó£¬ËÜÁϱ¡Ä¤±í²ã¹Ø¼üת»¯³ÉÁ˱½¼×È©ÀàºÍôÈËáÀàС·Ö×ÓË®ÎïÖÊ¡£´ËÍâ¸ù¾Ý¶ÔÁÑ»¯¹Ø¼üÑõ»¯²úÎïÕýÀë×Ó·å×ÜÃæ»ýµÄ°ë¶¨Á¿·ÖÎö£¬·¢¾õÑô¹âÕÕÉä•r¼äµÍÓÚ80 hʱ£¬¸÷Ñõ»¯²úÎï²ÐƬ»ù±¾ÉÏ›]ÓÐת±ä£»¶øÔÚÑô¹âÕÕÉä80~120 hÈ«¹ý³ÌÖУ¬ËÜÁϱ¡Ä¤ÁÑ»¯µÄÑõ»¯²úÎï½Ï¶à£¬·¢ÉúÁËÒ»¸öÁ¬Ðøº¯Êý£»µ±Ñô¹âÕÕÉ䳬³ö120 hºó£¬Ñõ»¯²úÎïÁ¿ÏÔÖø½µµÍ¡£

±í1 ×ÏÍâÏßË¥ÀÏÎïÖÊ

Tab.1 UV aging products of Parylene C

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2 ÀÏ»¯¶ÔParyleneËÜÁϱ¡Ä¤ÌØÐÔµÄΣº¦

ParyleneËÜÁϱ¡Ä¤µÄµç×Ó¹âѧÌØÐÔ¡¢Í¸ÆøÐÔ͸ÆøÐÔÄÜÄÜ¡¢ÎïÀíÐÔÄÜ£¬¼°Æäµç´Å³¡ÀíÂÛÌØÐÔÊÇÆä¹Ø¼üÖ¸±êÖµ£¬¶ÔÆäÔËÓþßÓзdz£ÖØÒªµÄΣº¦¡£Òò¶ø¿ÆѧÑо¿ÀÏ»¯ºóParyleneËÜÁϱ¡Ä¤ÌØÐÔµÄת±ä£¬¶ÔÆä¾ßÌåÔËÓþ߱¸Ö÷ÒªÏÖʵÒâÒå¡£

2.1 µç×Ó¹âѧÌØÐÔ

ParyleneËÜÁϱ¡Ä¤¶ÔÄܼû¹âµÄ͸¹â¶ÈΪ90%ÉÏÏ¡£SantucciµÈ[29]¸ÉÁ˾­×ÏÍâÏßÖ±ÉäµÄParylene CËÜÁϱ¡Ä¤ÓÚÆøÌå¡¢H2O¡¢H2O2¡¢O2¡¢He±ê׼ϣ¬ÔÚÄܼû¹âµØÇø¿ªÕ¹Í¸¹â¶È¿ÆѧÑо¿¡£½«±¡ºñΪ300 nmµÄParylene CËÜÁϱ¡Ä¤¸÷×Ô·ÅÖò»Ò»ÑùµÄÆûÌå·ÕΧÖУ¬²¢ÇÒÒÔ254 nmµÄ×ÏÍâÏßÖ±Éä120 min¡£½Y¹û·¢¾õ£º½â¾ö¹ýµÄËÜÁϱ¡Ä¤¶ÔÄܼû¹âµÄ͸¹â¶È»ù±¾ÉÏ›]ÓÐת±ä£¬¼ûͼ5£»µ«µ±·¢Éú¡°Ê§ÂÌ¡±×´¿ö(ËÜÁϱ¡Ä¤ÒÑÏÔÖøË¥ÀÏ)ºó£¬Æä͸¹â¶ÈÏÔÖø½µµÍ¡£

6.png

ͼ5 ÔÚ²»Ò»ÑùÆûÌåÖÐ͸¹â¶ÈËæÖ±Éä•r¼äµÄת±ä

Fig.5 Transmittance changes with irradiation time in different gases

2.2 ͸ÆøÐÔ͸ÆøÐÔÄÜÄÜ

ParyleneËÜÁϱ¡Ä¤¶ÔË®ÕôÆû¡¢CO2µÈÆûÌåµÄ¸ß×è¸ôÊÇÆäÌØÐÔµÄÖ÷Òª±ê×¼Ö®Ò»£¬ÊÇÈ·¶¨ÆäʹÓ÷¶³ëµÄÓÈΪÖØÒªµÄÒªËØ¡£W H HubbellµÈ[44]Ñо¿·¢ÏÖ£¬ParyleneCËÜÁϱ¡Ä¤¾ß½ÏºÃµÄ¿¹Êª·ÀË®¼°ÆûÌå¸ô¾øÌص㣻´ËÍâ¾ÅÓλáJ9ÕæÈË»¹·¢¾õ£¬²»Ò»ÑùÖÖÀàParyleneËÜÁϱ¡Ä¤ÖУ¬Parylene CËÜÁϱ¡Ä¤¶ÔH2O¡¢O2ºÍCO2µÄ¸ô¾øÌØÐÔ×îºÃÊÇ[45]¡£ÓÐÑо¿±íÃ÷£¬Ë®ÕôÆûµÈÔÚËÜÁϱ¡Ä¤ÖеÄÂûÑÓºÍÉøÈëÖ÷ÒªÊǸù¾Ý²»¶¨ÐÎÇø½øÐеÄ[46]£»¾­×ÏÍâÏßÖ±Éäºó£¬ËÜÁϱ¡Ä¤µÄÏà¶ÔÐÔ²£Á§»¯Î¶ÈÇ÷Ïò½¡È«£¬²»¶¨ÐεØÇø½µµÍ£¬Òò¶ø¶ÔË®ÕôÆûµÄ¸ô¾øÌØÐÔÓÐËùÔö¼Ó£»µ«µ±Ö±Éä•r¼ä½øÒ»²½ÌáÉý£¬ËÜÁϱ¡Ä¤µÄ·Ö×ӽṹÁ´ºÜÓпÉÄܲúÉúÆÆÁÑ£¬µ¼Ö²£Á§»¯Î¶ȽµµÍ¡¢Í¸ÆøÐÔÄÜÌáÉý[47]£¬¼ûͼ6¡£

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ͼ6 Ë®ÕôÆûͨ¹ýÐÔËæÖ±Éä•r¼äµÄת±äÇúÏßͼ

Fig.6 Variation curve between vapor permeability and irradiation time

 

2.3 ÎïÀíÐÔÄÜ

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[5] ÍõÖú·É,¶¡Ê¿½ø,ÕÅÎÀ,µÈ. ULSIµÍÏà¶Ô½éµç³£ÊýÔ­²ÄÁÏÖÆÈ¡ÖÐCVD¼¼ÊõÐÔ[J]. ϸ΢Éú²ú¼Ó¹¤¼¼ÊõÐÔ, 2001, 30(1): 39-43.

[6] Jeffrey B Fortin, et al. Chemical vapor deposition polymerization:The growth and properties of parylene thin films[M].Netherlands: Kluwer Academic Publishers, 2004: 1-2.

[7] ¹¨µÂ²Å,ÞÉÈý²Ê,ÍõÃã. ÅÉÀ­ÂÚͿĤ¼¼ÊõÐÔÔÚÕä¹óÎÄÎï¼°Ê鼮ά»¤ÖеÄÓ¦ÓÃÑо¿[J]. ÐÂÐ͹¦ÄܲÄÁÏÓëÔªÆ÷¼þѧ¿¯, 1996 (8): 29-34.

[8] Senkevich J J, Desu S B, Simkovic V. Temperature studiesof optial birefringence and X-ray diffraction with poly(pxylylen),poly(chloro-p-xylylene) and poly(tetra-fluoro-pxylylene)CVD thin films[J]. Polymer, 2000, 41(7): 2 379-2 390.

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[10] Waters J F, Sutter J K, Meador M A. Addition curingthermosets endcapped with 4-amino[2.2]paracyclophane

 

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